Helium-ion-beam nanofabrication: Extreme processes and applications - Phys.org
7/29/2022 12:00:00 AM3 years 6 months ago
by Science X staff
by Science X staff
Helium ion beam (HIB) technology plays an important role in the extreme fields of nanofabrication. Due to high resolution and sensitivity, HIB nanofabrication technology is widely used to pattern nanostructures into components, devices, or systems in integrat…
Helium ion beam (HIB) technology plays an important role in the extreme fields of nanofabrication. Due to high resolution and sensitivity, HIB nanofabrication technology is widely used to pattern nan… [+7578 chars]
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